About
Through Q-NEXT, a DOE National Quantum Information Science Research Center, SLAC operates a unique superconducting quantum foundry – the Detector Microfabrication Facility (DMF) – for the high-precision fabrication of superconducting quantum devices.
SLAC's Detector Microfabrication Facility (DMF) is a dedicated 5,500 sq. ft. foundry for the R&D and at-scale production of quantum and superconducting sensors and detectors with high uniformity, complexity, yield, and reproducibility.
In addition to a specialized toolset on 150mm wafers, the DMF also includes necessary capabilities for post-fabrication metrology, room-temperature and cryogenic characterization, as well as validation of functionality and performance of devices produced at the DMF.
The facility is envisioned to support DOE mission science by enabling collaborative research across universities, labs and industry in quantum information science and fundamental physics.
