Nano-X Tools list

Nano-X Tools List

•  Lithography: Electron (100 keV, 30 keV), ion (Ga), optical (planned);

• Metrology: FIB/SEM with cryo, EDS, EBSD; ellipsometer, 4-point probe, 3D microscope, Optical microscope, profilometer, potentiostat;

• Deposition: E beam evaporator, magnetron sputterer, electroplating, atomic layer deposition (planned), ion beam deposition (planned);

• Etch: ICP-RIE fluorine chemistry, ICP-ALE (10/22), ion mill (planned);

• Sample Prep: Acid, base, solvent benches, critical point dryer, ultramicrotome, high-pressure freezer, sputterer, cryo-sputterer and freeze-fracture, cryo-transfer, glove box, spinners, hot/cold plates, ovens.

• Software: Avizo, COMSOL, GenISys, In-house x-ray optics simulation.